Flexicoat 850
The industrial coating machine Flexicoat 850, IHI Hauzer Techno Coating B.V., Venlo, Netherlands, allows coating deposition on components of various geometries and materials. The coating machine is suitable for coating development and plasma analysis on an industrial scale. Coating deposition is based on cathodic arc evaporation (CAE). In CAE, the high energy of an cathodic arc spot is used for thermal evaporation of the target material. In contrast to conventional CAE, the machine is equipped with controllable electric coils behind the targets. This allows manipulation of the magnetic field during deposition process (advanced controlled arc) and reduced droplet emission. The machine is equipped with gas supplies for argon (Ar), nitrogen (N2), oxygen (O2), hydrogen (H2) and acetylene (C2H2). The machine has a plasma source, which allows substrate cleaning by Ar ion etching and H2 supported Ar ion etching additional to conventional metal ion etching. The reactive gases N2, O2 and C2H2 allow the deposition of nitride, oxide and carbon containing (DLC) coatings. Furthermore, N2 can be used for plasma nitriding processes.
Technical data
| Parameter |
|---|
| Reduced droplet emission by advanced controlled arc |
| Separate plasma source |
| 2 separate cathode banks, each with 3 evaporators |
|
Additional flanges for plasma diagnosis |
| Measurement of sample temperature on bias potential during deposition |