CemeCon CC800/9 SinOx

  Coating unit with a SEM image Copyright: © IOT

The Cemecon CC800/9 SinOx is an industrial coating facility based on magnetron sputtering (MS) technique by using medium frequency (mf) or direct current (dc). For complex geometries of tools, the deposition of smooth and dense coatings is necessary. Therefore, oxidic coatings like ZrO2 and Al2O3 are beneficial because they offer an alternative to conventional coatings. As one of many ways it is possible to deposit crystalline Al2O3 and ZrO2 oxide. For the production of these isolating films the CC800/9 Sinox was developed. It combines the advantages of the mf and dc technologies. Even the deposition of hard coatings in low-temperature processes T < 200 °C, e.g. deposition of coatings on temperature-sensitive steel, is not a problem with this technology. Furthermore, pulse technology allows the deposition of hard nanocomposite coatings like (Ti,Al,Si)N or (Cr,Al,Si)N with small grain sizes (d = 3 - 10 nm) and high hardness (HIT = 30 - 40 GPa) for machining applications.

Technical data

Parameter Value
Coating chamber volume

1,000 x 1,000 x 1,000 mm³

Variable cathodes up to 800 x 88 mm²
Cathode power

P = 16 kW

Plasma analytics available