Machine learning based model for plasma prediction in high power pulsed magnetron sputtering processes

Bobzin, Kirsten; Kalscheuer, Christian; Carlet, Marco; Janowitz, Julia (Corresponding author)

Amsterdam [u.a.] : Elsevier (2023)
Journal Article

In: Thin solid films
Volume: 777
Page(s)/Article-Nr.: 139903, 8 Seiten

Institutions

• Internet of Production [080067]
• Chair of Surface Engineering [419010]