Prediction of OES intensity ratios based on coating unit data in HPPMS processes by ANN

Bobzin, Kirsten; Kalscheuer, Christian; Möbius, Max Philip; Schulze, Christoph Franz Robert (Corresponding author)

Bristol : IOP Publ. (2023)
Contribution to a book, Journal Article

In: Journal of physics / D
Volume: 56
Issue: 36
Page(s)/Article-Nr.: 364001, 9 Seiten

Institutions

• Internet of Production [080067]
• Chair of Surface Engineering [419010]