Hybrid reactive sputtering of transition metal aluminum oxynitrides

Bobzin, Kirsten; Kalscheuer, Christian; Carlet, Marco (Corresponding author); Schulze, Christoph Franz Robert

Amsterdam [u.a.] : Elsevier (2021, 2022)
Journal Article

In: Thin solid films
Volume: 742
Page(s)/Article-Nr.: 139028