CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Maier, H. J.; Heidenblut, T.; Besserer, H.-B.; Kahra, C.; Janowitz, Julia (Corresponding author)

New York, NY : American Institute of Physics (2021, 2022)
Journal Article

In: Journal of vacuum science & technology / A
Volume: 40
Issue: 1
Page(s)/Article-Nr.: 013414