Influence of a short reverse positive HPPMS pulse on the deposition of CrAlN

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Eichenhofer, G.; Schulze, Christoph Franz Robert (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2021)
Journal Article

In: Surface and coatings technology
Volume: 423
Page(s)/Article-Nr.: 127625