Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried; Schulze, Christoph Franz Robert (Corresponding author)

Amsterdam [u.a.] : Elsevier (2021)
Journal Article

In: Thin solid films
Volume: 732
Page(s)/Article-Nr.: 138792