Understanding the deformation and cracking behavior of Cr-based coatings deposited by hybrid direct current and high power pulse magnetron sputtering : From nitrides to oxynitrides

Brögelmann, Tobias; Bobzin, Kirsten; Kruppe, Nathan Christopher; Arghavani, Mostafa (Corresponding author)

Amsterdam [u.a.] : Elsevier (2019)
Contribution to a book, Journal Article

In: Thin solid films
Volume: 688
Page(s)/Article-Nr.: 137354

Identifier