Influence of dcMS and HPPMS in a dcMS/HPPMS hybrid process on plasma and coating properties

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author)

Amsterdam [u.a.] : Elsevier (2016)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 620
Page(s)/Article-Nr.: 188-196

Institutions

• Chair of Surface Engineering [419010]