Einblicke in die PVD- und CVD-Technologie
Bobzin, Kirsten; Brögelmann, Tobias; Bagcivan, Nazlim
(2013)
Conference Presentation
In: RWTH Seminar: PVD-CVD-Seminar Aachen 2013-06-12 - 2013-06-12
Page(s)/Article-Nr.: 54 Folien
Institutions
- Chair of Surface Engineering [419010]
Identifier
- RWTH PUBLICATIONS: RWTH-2015-03743