Investigation of the Properties of Low Temperature (Cr1-xAlx)N Coatings Deposited via Hybrid PVD DC-MSIP/HPPMS

• Untersuchung der Eigenschaften von Niedertemperatur (Cr1-xAlx)N-Beschichtungen abgeschieden mittels Hybrid PVD DC-MSIP/HPPMS

Bobzin, Kirsten; Bagcivan, Nazlim; Brugnara, Ricardo H. (Corresponding author)

Weinheim : Wiley-VCH [u.a.] (2013)
Contribution to a conference proceedings, Journal Article

In: Materialwissenschaft und Werkstofftechnik = Materials science and engineering technology
Volume: 44
Issue: 8
Page(s)/Article-Nr.: 667-672

Institutions

• Chair of Surface Engineering [419010]