(Cr1-xAlx)N : A comparison of direct current, middle frequency pulsed and high power pulsed magnetron sputtering for injection molding components

Bagcivan, Nazlim; Bobzin, Kirsten; TheiƟ, Sebastian (Corresponding author)

Amsterdam Elsevier : [u.a.] (2013)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 528
Page(s)/Article-Nr.: 180-186

Identifier