Synthesis of nano-structured HPPMS CrN/AlN coatings

Bagcivan, Nazlim; Bobzin, Kirsten; TheiƟ, Sebastian

Bristol : IOP Publ. [u.a.] (2013)
Journal Article

In: Journal of physics / D, Applied physics
Volume: 46
Issue: 8
Page(s)/Article-Nr.: 084001

Identifier