Time resolved optical emission spectroscopy of an HPPMS coating process

TheiƟ, Sebastian; Bibinov, Nikita; Bagcivan, Nazlim; Ewering, Mara Therese; Awakowicz, Peter; Bobzin, Kirsten

Bristol : IOP (2010)
Abstract, Journal Article

In: Journal of physics / D, Applied physics
Volume: 43
Issue: 7
Page(s)/Article-Nr.: 8-8

Identifier