Comparison of the structure of PVD thin films deposited with different deposition energies

Lugscheider, Erich; Barimani, Cyrus; Wolff, C.; Guerreiro, S.; Döpper, G.

Lausanne : Elsevier Sequoia (1996)
Journal Article

In: Surface & coatings technology
Volume: 86/87
Issue: 1
Page(s)/Article-Nr.: 177-183

Institutions

• Chair of Surface Engineering [419010]