Magnetronsputtered hard material coatings on thermoplastic polymers for clean room applications

Lugscheider, Erich; Bärwulf, Stephan; Barimani, Cyrus; Riester, M.; Hilgers, H.

Amsterdam [u.a.] : Elsevier (1998)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: ...