Arc Ion Plating Process Monitoring by Optical Emission Spectroscopy Exemplified for Chromium Containing Coatings

Bobzin, Kirsten; Bagcivan, Kirsten; Immich, Philipp; TheiƟ, Sebastian

Weinheim : Wiley (2009)
Contribution to a conference proceedings, Journal Article

In: Plasma processes and polymers
Volume: 6.2009
Issue: 6/7
Page(s)/Article-Nr.: S357-S361

Identifier