Influence of a short reverse positive HPPMS pulse on the deposition of CrAlN
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Eichenhofer, G.; Schulze, Christoph Franz Robert (Corresponding author)
Amsterdam [u.a.] : Elsevier Science (2021)
Journal Article
In: Surface and coatings technology
Volume: 423
Page(s)/Article-Nr.: 127625
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.surfcoat.2021.127625
- RWTH PUBLICATIONS: RWTH-2021-08730