Understanding the deformation and cracking behavior of Cr-based coatings deposited by hybrid direct current and high power pulse magnetron sputtering : From nitrides to oxynitrides

Brögelmann, Tobias; Bobzin, Kirsten; Kruppe, Nathan Christopher; Arghavani, Mostafa (Corresponding author)

Amsterdam [u.a.] : Elsevier (2019)
Buchbeitrag, Fachzeitschriftenartikel

In: Thin solid films
Band: 688
Seite(n)/Artikel-Nr.: 137354

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