Laserstrukturierte nitridische und oxinitridische Beschichtungen abgeschieden mittels Mittelfrequenz‐Magnetron‐Sputtering

• Laser structured nitride and oxynitride coatings deposited by middle frequency magnetron sputtering

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Naderi, Mona (Corresponding author)

Riley, Ind : Science and Engineering Publishing Company (SEP) (2019)
Journal Article

In: International journal of material science
Volume: 50
Issue: 9
Page(s)/Article-Nr.: 1057-1069