Laserstrukturierte nitridische und oxinitridische Beschichtungen abgeschieden mittels Mittelfrequenz‐Magnetron‐Sputtering
- Laser structured nitride and oxynitride coatings deposited by middle frequency magnetron sputtering
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Naderi, Mona (Corresponding author)
Riley, Ind : Science and Engineering Publishing Company (SEP) (2019)
Journal Article
In: International journal of material science
Volume: 50
Issue: 9
Page(s)/Article-Nr.: 1057-1069
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1002/mawe.201800170
- RWTH PUBLICATIONS: RWTH-2019-08630