(Cr,Al)ON Deposited by Hybrid dcMS/HPPMS: A study on Incorporation of Oxygen

Brögelmann, Tobias; Bobzin, Kirsten; Kruppe, Nathan Christopher (Corresponding author); Carlet, Marco

Amsterdam [u.a.] : Elsevier Science (2019)
Journal Article

In: Surface and coatings technology
Volume: 369
Page(s)/Article-Nr.: 238-243