(Cr,Al)ON Deposited by Hybrid dcMS/HPPMS: A study on Incorporation of Oxygen
Brögelmann, Tobias; Bobzin, Kirsten; Kruppe, Nathan Christopher (Corresponding author); Carlet, Marco
Amsterdam [u.a.] : Elsevier Science (2019)
Journal Article
In: Surface and coatings technology
Volume: 369
Page(s)/Article-Nr.: 238-243
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.surfcoat.2019.04.066
- RWTH PUBLICATIONS: RWTH-2019-06051