Enhanced PVD process control by online substrate temperature measurement

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2018)
Journal Article

In: Surface and coatings technology
Volume: 354
Page(s)/Article-Nr.: 383-389

Institutions

• Chair of Surface Engineering [419010]