Enhanced PVD process control by online substrate temperature measurement
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher (Corresponding author)
Amsterdam [u.a.] : Elsevier Science (2018)
Journal Article
In: Surface and coatings technology
Volume: 354
Page(s)/Article-Nr.: 383-389
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.surfcoat.2018.07.096
- RWTH PUBLICATIONS: RWTH-2018-229725