Investigations on the substrate bias influence on reactive HPPMS plasmas

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author)

Amsterdam [u.a.] : Elsevier (2018)
Journal Article

In: Thin solid films
Volume: 663
Page(s)/Article-Nr.: 62-72

Institutions

  • Chair of Surface Engineering [419010]

Identifier