In situ investigation of production processes in a large chamber scanning electron microscope
Aretz, Anke; Ehle, Lisa Christine; Häusler, André; Bobzin, Kirsten; Öte, Mehmet; Wiesner, Stefanie; Schmidt, Alexander; Gillner, Arnold; Poprawe, Reinhart; Mayer, Joachim (Corresponding author)
Amsterdam : Elsevier Science (2018)
Journal Article
In: Ultramicroscopy
Volume: 193
Page(s)/Article-Nr.: 151-158
Institutions
- Central Facility for Electron Microscopy [025000]
- Chair for Laser Technology [418710]
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.ultramic.2018.07.002
- DOI: 10.18154/RWTH-2018-227142
- RWTH PUBLICATIONS: RWTH-2018-227142