In situ investigation of production processes in a large chamber scanning electron microscope

Aretz, Anke; Ehle, Lisa Christine; Häusler, André; Bobzin, Kirsten; Öte, Mehmet; Wiesner, Stefanie; Schmidt, Alexander; Gillner, Arnold; Poprawe, Reinhart; Mayer, Joachim (Corresponding author)

Amsterdam : Elsevier Science (2018)
Journal Article

In: Ultramicroscopy
Volume: 193
Page(s)/Article-Nr.: 151-158

Institutions

• Central Facility for Electron Microscopy [025000]
• Chair for Laser Technology [418710]
• Chair of Surface Engineering [419010]