Enhanced PVD Process Control by Online Substrate Temperature Measurement

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher

(2018)
Conference Presentation

In: 45. International Conference on Metallurgical Coatings and Thin Films San Diego 2018-04-23 - 2018-04-27

Institutions

• Chair of Surface Engineering [419010]