Enhanced PVD Process Control by Online Substrate Temperature Measurement
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher
(2018)
Conference Presentation
In: 45. International Conference on Metallurgical Coatings and Thin Films San Diego 2018-04-23 - 2018-04-27
Institutions
- Chair of Surface Engineering [419010]
Identifier
- RWTH PUBLICATIONS: RWTH-2018-225521