Space-resolved plasma diagnostics in a hybrid (Cr,Al)N process
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author)
New York, NY : American Institute of Physics (2018)
Journal Article
In: Journal of vacuum science & technology / A
Volume: 36
Issue: 3
Page(s)/Article-Nr.: 031515
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1116/1.5020151
- RWTH PUBLICATIONS: RWTH-2018-224270