Fundamental study of an industrial reactive HPPMS (Cr,Al)N process
Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author); von Keudell, A.; Hecimovic, A.; Ludwig, A.; Grochla, Dario; Banko, Lars
Melville, NY : American Inst. of Physics (2017)
Journal Article
In: Journal of applied physics
Volume: 122
Issue: 1
Page(s)/Article-Nr.: 015302
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1063/1.4990997
- RWTH PUBLICATIONS: RWTH-2017-07063