Fundamental study of an industrial reactive HPPMS (Cr,Al)N process

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried (Corresponding author); von Keudell, A.; Hecimovic, A.; Ludwig, A.; Grochla, Dario; Banko, Lars

Melville, NY : American Inst. of Physics (2017)
Journal Article

In: Journal of applied physics
Volume: 122
Issue: 1
Page(s)/Article-Nr.: 015302