High-rate deposition of thick (Cr,Al)ON coatings by high speed physical vapor deposition

Bobzin, Kirsten; Brögelmann, Tobias; Kalscheuer, Christian; Liang, Tiancheng (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2017)
Journal Article

In: Surface and coatings technology
Volume: 322
Page(s)/Article-Nr.: 152-162