Characterization of DC magnetron plasma in Ar/Kr/N 2 mixture during deposition of (Cr,Al)N coating
Bobzin, Kirsten; Bagcivan, Nazlim; Theiß, S.; Brugnara, Ricardo H.; Bibinov, N. (Corresponding author); Awakowicz, P.
Bristol : IOP Publ. (2017)
Journal Article
In: Journal of physics / D, Applied physics
Volume: 50
Issue: 7
Page(s)/Article-Nr.: 075203
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1088/1361-6463/aa4ea2
- RWTH PUBLICATIONS: RWTH-2017-03091