Characterization of DC magnetron plasma in Ar/Kr/N 2 mixture during deposition of (Cr,Al)N coating

Bobzin, Kirsten; Bagcivan, Nazlim; Theiß, S.; Brugnara, Ricardo H.; Bibinov, N. (Corresponding author); Awakowicz, P.

Bristol : IOP Publ. (2017)
Journal Article

In: Journal of physics / D, Applied physics
Volume: 50
Issue: 7
Page(s)/Article-Nr.: 075203