Influence of dcMS and HPPMS in a dcMS/HPPMS Hybrid Process on Plasma and Coating Properties

Bobzin, Kirsten; Brögelmann, Tobias; Kruppe, Nathan Christopher; Engels, Martin Gottfried

(2016)
Poster

In: 43. International Conference on Metallurgical Coatings and Thin Films San Diego, CA 2016-04-25 - 2016-04-29