Influence of HPPMS pulse parameters on the reactive gas N2 in the deposition process of (Cr,Al)N

Bobzin, Kirsten; Brögelmann, Tobias; Brugnara, Ricardo H.; Kruppe, Nathan Christopher; Chromy, Stephan

(2015)
Conference Presentation

In: 6. International Conference on HIPIMS 2015 Braunschweig 2015-06-10 - 2015-06-11
Page(s)/Article-Nr.: 15 Folien