Analysis of ion energy distribution at the substrate during a HPPMS (Cr,Al)N process using retarding field energy analyzer and energy resolved mass spectrometer

Bobzin, Kirsten; Brögelmann, Tobias; Brugnara, Ricardo H.; Chromy, S. (Corresponding author)

Amsterdam [u.a.] : Elsevier (2015)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 596
Page(s)/Article-Nr.: 140-146