Analysis of ion energy distribution at the substrate during a HPPMS (Cr,Al)N process using retarding field energy analyzer and energy resolved mass spectrometer
Bobzin, Kirsten; Brögelmann, Tobias; Brugnara, Ricardo H.; Chromy, S. (Corresponding author)
Amsterdam [u.a.] : Elsevier (2015)
Contribution to a conference proceedings, Journal Article
In: Thin solid films
Volume: 596
Page(s)/Article-Nr.: 140-146
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.tsf.2015.08.059
- RWTH PUBLICATIONS: RWTH-2016-05997