Einblicke in die PVD- und CVD-Technologie
Engels, Martin Gottfried; Bobzin, Kirsten; Bagcivan, Nazlim; Bastürk, Serhan
(2014)
Conference Presentation
In: RWTH Seminar: PVD-CVD-Seminar 2014 Aachen 2014-05-21 - 2014-05-21
Page(s)/Article-Nr.: 54 Folien
Institutions
- Chair of Surface Engineering [419010]
Identifier
- RWTH PUBLICATIONS: RWTH-2015-03748