Simulation and Plasma Diagnostic Investigation of the Reactive Sputter Deposition of Alumina on Different Coating Units

Bobzin, Kirsten; Bagcivan, N.; Immich, P.; Parkot, D.

(2008)
Poster

In: 35. International conference on metallurgical coatings and thin films San Diego 2008-04-28 - 2008-05-02