Simulation and Plasma Diagnostic Investigation of the Reactive Sputter Deposition of Alumina on Different Coating Units
Bobzin, Kirsten; Bagcivan, N.; Immich, P.; Parkot, D.
(2008)
Poster
In: 35. International conference on metallurgical coatings and thin films San Diego 2008-04-28 - 2008-05-02
Institutions
- Chair of Surface Engineering [419010]
Identifier
- RWTH PUBLICATIONS: RWTH-2015-01737