Influence of Process Parameters on the Properties of Low Temperature (Cr1-xAlx)N Coatings Deposited via Hybrid PVD DC-MSIP/HPPMS

Bobzin, Kirsten; Bagcivan, N.; Ewering, M.; Brugnara, R. H.

(2012)
Conference Presentation

In: 39. International conference on metallurgical coatings and thin films San Diego 2012-04-23 - 2012-04-27