Simulation of Neutral Gas Dynamics for PVD DC-MSIP and HPPMS Processes
Bobzin, Kirsten; Bagcivan, N.; Theiss, Sebastian; Brugnara, R. H.; Schäfer, M.; Trieschmann, J.; Brinkmann, R.; Mussenbrock, T.
(2013)
Poster
In: 40. International conference on metallurgical coatings and thin films San Diego 2013-04-28 - 2013-05-03
Institutions
- Chair of Surface Engineering [419010]
Identifier
- RWTH PUBLICATIONS: RWTH-2015-01701