Simulation of Neutral Gas Dynamics for PVD DC-MSIP and HPPMS Processes

Bobzin, Kirsten; Bagcivan, N.; Theiss, Sebastian; Brugnara, R. H.; Schäfer, M.; Trieschmann, J.; Brinkmann, R.; Mussenbrock, T.

(2013)
Poster

In: 40. International conference on metallurgical coatings and thin films San Diego 2013-04-28 - 2013-05-03