CrN/AlN nanolaminate coatings deposited via high power pulsed and middle frequency pulsed magnetron sputtering

Bagcivan, N.; Bobzin, Kirsten; Ludwig, A.; Grochla, D.; Brugnara, R. H. (Corresponding author)

Amsterdam [u.a.] : Elsevier (2014)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 572
Page(s)/Article-Nr.: 153-160