Reproducible arc-PVD process management under various reactive gases
Knotek, Otto; Löffler, Frank; Krämer, G.; Stössel, C.
Kidlington : Elsevier Science [u.a.] (1992)
Contribution to a conference proceedings, Journal Article
In: Vacuum
Volume: 43
Issue: 5/7
Page(s)/Article-Nr.: 567-571
Identifier
- DOI: 10.1016/0042-207X(92)90079-C
- RWTH PUBLICATIONS: RWTH-CONV-086630