Reproducible arc-PVD process management under various reactive gases

Knotek, Otto; Löffler, Frank; Krämer, G.; Stössel, C.

Kidlington : Elsevier Science [u.a.] (1992)
Contribution to a conference proceedings, Journal Article

In: Vacuum
Volume: 43
Issue: 5/7
Page(s)/Article-Nr.: 567-571