Influence of HPPMS pulse length and inert gas mixture on the properties of (Cr,Al)N coatings

Bagcivan, Nazlim; Bobzin, Kirsten; Grundmeier, G.; Wiesing, M.; Ozcan, O.; Kunze, C.; Brugnara, Ricardo H. (Corresponding author)

Amsterdam ; Jena : Elsevier (2013)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 549
Page(s)/Article-Nr.: 192-198