Arc deposition of Ti-C and Ti-C-N using acetylene as a reactive gas

Knotek, Otto; Löffler, Frank; Krämer, G.

Kidlington : Elsevier Science [u.a.] (1992)
Contribution to a conference proceedings, Journal Article

In: Vacuum
Volume: 43
Issue: 5/7
Page(s)/Article-Nr.: 645-648