Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

Bobzin, Kirsten; Bagcivan, Nazlim; Theiß, Sebastian; Brugnara, Ricardo H.; Schäfer, Marcel Pascal; Brinkmann, Ralf Peter; Mussenbrock, Thomas; Trieschmann, Jan (Corresponding author)

Amsterdam : Elsevier, [u.a.] (2013)
Contribution to a conference proceedings, Journal Article

In: Surface & coatings technology
Volume: 237
Page(s)/Article-Nr.: 176-181