Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor
Bobzin, Kirsten; Bagcivan, Nazlim; Theiß, Sebastian; Brugnara, Ricardo H.; Schäfer, Marcel Pascal; Brinkmann, Ralf Peter; Mussenbrock, Thomas; Trieschmann, Jan (Corresponding author)
Amsterdam : Elsevier, [u.a.] (2013)
Contribution to a conference proceedings, Journal Article
In: Surface & coatings technology
Volume: 237
Page(s)/Article-Nr.: 176-181
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.surfcoat.2013.08.018
- RWTH PUBLICATIONS: RWTH-CONV-083329