Comparison of (Cr0.75Al0.25)N Coatings Deposited by Conventional and High Power Pulsed Magnetron Sputtering

Bobzin, Kirsten; Bagcivan, Nazlim; Theiß, Sebastian

Weinheim : Wiley-VCH (2012)
Contribution to a conference proceedings, Journal Article

In: Contributions to plasma physics : CPP
Volume: 52
Issue: 7
Page(s)/Article-Nr.: 601-606