Plasma diagnostics as a tool for the modeling and simulation of sputter processes

Lugscheider, Erich; Papenfuss-Janzen, Norbert

Lausanne : Elsevier Sequoia (2004)
Contribution to a conference proceedings, Journal Article

In: Surface & coatings technology
Volume: 177-178
Page(s)/Article-Nr.: 597-602

Institutions

• Chair of Surface Engineering [419010]