Plasma diagnostics as a tool for the modeling and simulation of sputter processes
Lugscheider, Erich; Papenfuss-Janzen, Norbert
Lausanne : Elsevier Sequoia (2004)
Contribution to a conference proceedings, Journal Article
In: Surface & coatings technology
Volume: 177-178
Page(s)/Article-Nr.: 597-602
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.surfcoat.2003.08.066
- RWTH PUBLICATIONS: RWTH-CONV-063680