Influence of different pulse parameters on the deposition of Al2O3
Bobzin, Kirsten; Bagcivan, Nazlim; Ewering, Mara Therese
Weinheim : Wiley-VCH (2010)
Journal Article
In: Materialwissenschaft und Werkstofftechnik = Materials science and engineering technology
Volume: 41
Issue: 8
Page(s)/Article-Nr.: 670-674
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1002/mawe.201000653
- RWTH PUBLICATIONS: RWTH-CONV-045798