Influence of different pulse parameters on the deposition of Al2O3

Bobzin, Kirsten; Bagcivan, Nazlim; Ewering, Mara Therese

Weinheim : Wiley-VCH (2010)
Journal Article

In: Materialwissenschaft und Werkstofftechnik = Materials science and engineering technology
Volume: 41
Issue: 8
Page(s)/Article-Nr.: 670-674