Understanding HPPMS PVD

Theiß, Sebastian; Bibinov, N.; Bagcivan, Nazlim; Ewering, Mara Therese; Awakowicz, Peter; Bobzin, Kirsten

Les Ulis : EDP Sciences (2010)
Journal Article

In: Europhysics news
Volume: 41
Issue: 3
Page(s)/Article-Nr.: 14-15