Energy resolved ion mass spectroscopy of (Ti,Al)N hard coatings deposited by bipolar pulsed magnetron sputtering

Lugscheider, Erich; Bobzin, Kirsten; Papenfuß-Janzen, Norbert; Erkens, Georg; Cremer, R.; Rambadt, S.

Amsterdam [u.a.] : Elsevier (2002)
Contribution to a conference proceedings, Journal Article

In: Surface & coatings technology
Volume: 174/175

Institutions

• Chair of Surface Engineering [419010]