Relation of hardness and oxygen flow of Al2O3 coatings deposited by reactive bipolar pulsed magnetron sputtering
Bobzin, Kirsten; Lugscheider, Erich; Maes, Michael; Pinero, Carmen
Amsterdam [u.a.] : Elsevier (2006)
Contribution to a conference proceedings, Journal Article
In: Thin solid films
Volume: 494
Issue: 1/2
Page(s)/Article-Nr.: 255-262
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/j.tsf.2005.08.162
- RWTH PUBLICATIONS: RWTH-CONV-031870