Relation of hardness and oxygen flow of Al2O3 coatings deposited by reactive bipolar pulsed magnetron sputtering

Bobzin, Kirsten; Lugscheider, Erich; Maes, Michael; Pinero, Carmen

Amsterdam [u.a.] : Elsevier (2006)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 494
Issue: 1/2
Page(s)/Article-Nr.: 255-262