Optical emission spectroscopy studies of titanium nitride sputtering on thermoplastic polymers
Lugscheider, Erich; Neuhäuser, M.; Bärwulf, Stephan; Hilgers, H.; Riester, M.
Lausanne : Elsevier Sequoia (1999)
Journal Article
In: Surface & coatings technology
Volume: 116/119
Page(s)/Article-Nr.: 981-985
Institutions
- Chair of Surface Engineering [419010]
Identifier
- DOI: 10.1016/S0257-8972(99)00214-5
- RWTH PUBLICATIONS: RWTH-CONV-025407