Optical emission spectroscopy studies of titanium nitride sputtering on thermoplastic polymers

Lugscheider, Erich; Neuhäuser, M.; Bärwulf, Stephan; Hilgers, H.; Riester, M.

Lausanne : Elsevier Sequoia (1999)
Journal Article

In: Surface & coatings technology
Volume: 116/119
Page(s)/Article-Nr.: 981-985