Simulation of the film growth and film-substrate mixing during the sputter deposition process

Lugscheider, Erich; Hayn, G. v.

Lausanne : Elsevier Sequoia (1999)
Journal Article

In: Surface & coatings technology
Volume: 116/119
Page(s)/Article-Nr.: 568-572

Institutions

  • Chair of Surface Engineering [419010]

Identifier